Project Description
Process Technologies
Advance Surface Modification
ALD
Nano-Composites
Plasma Surface Activation
Silination
Typical Industries
Genomics Research
Optics
Semiconductors
Sensors
Applications
Adhesion Promoters
Assays
BioMEMS
Glassware
Nano-Imprint
MEMS
The RPX-740 is fully automated with an interface for factory automation robotics. Ideal for 300mm Wafer EFEM or 200mm Wafer Pod Loaders in an automated factory.
- 82 liter Chamber (Capacity Reference: four 200mm Wafer Cassettes).
- Automated Gate Valve Style Door for robotic load and unload.
- Optional Siemens controller and SECS/GEM interface.
Related Products
- Shieldex Cartridges for Blue Lantern productmsayenko2019-04-18T16:38:13+00:00
Shieldex Cartridges for Blue Lantern product
- Vapporrix Cartridges for RPX family of productsmsayenko2019-04-17T03:02:09+00:00
Vapporrix Cartridges for RPX family of products
- Blue Lantern Desktop Plasma System (PECVD)msayenko2019-04-25T15:34:54+00:00
Blue Lantern Desktop Plasma System (PECVD)
- RPX-740 – EFEM / Pod Loader Production Enabled Toolingmsayenko2019-04-25T15:43:01+00:00
RPX-740 – EFEM / Pod Loader Production Enabled Tooling
- RPX-560 : Production Capacity Surface Modificationsmsayenko2019-04-17T14:49:52+00:00
RPX-560 : Production Capacity Surface Modifications
- RPX-540: Complete Surface Modifications for Manufacturing & Developmentmsayenko2019-04-17T14:49:23+00:00
RPX-540: Complete Surface Modifications for Manufacturing & Development
- RPX-210: Benchtop Silanation for R&D and Small Volume Productionmsayenko2019-04-17T14:48:54+00:00
RPX-210: Benchtop Silanation for R&D and Small Volume Production
