Project Description

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    Process Technologies

    Advance Surface Modification
    ALD
    Nano-Composites
    Plasma Surface Activation
    Silination

    Typical Industries

    Genomics Research
    Optics
    Semiconductors
    Sensors

    Applications

    Adhesion Promoters
    Assays
    BioMEMS
    Glassware
    Nano-Imprint
    MEMS

    The RPX-740 is fully automated with an interface for factory automation robotics. Ideal for 300mm Wafer EFEM or 200mm Wafer Pod Loaders in an automated factory. Available with SECS/GEM (E30) Communications. Contact IST to view EFEM robot options.

    • 82 liter Chamber (Capacity Reference: four 200mm Wafer Cassettes).
    • Automated Gate Valve Style Door for robotic load and unload.
    • Optional Siemens controller and SECS/GEM interface.

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