Project Description
Process Technologies
Advance Surface Modification
ALD
Nano-Composites
Plasma Surface Activation
Silination
Typical Industries
Genomics Research
Optics
Semiconductors
Sensors
Applications
Adhesion Promoters
Assays
BioMEMS
Glassware
Nano-Imprint
MEMS
The RPX-740 is fully automated with an interface for factory automation robotics. Ideal for 300mm Wafer EFEM or 200mm Wafer Pod Loaders in an automated factory.
- 82 liter Chamber (Capacity Reference: four 200mm Wafer Cassettes).
- Automated Gate Valve Style Door for robotic load and unload.
- Optional Siemens controller and SECS/GEM interface.
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