Project Description

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Process Technologies

Advance Surface Modification
ALD
Nano-Composites
Plasma Surface Activation
Silination

Typical Industries

Genomics Research
Optics
Semiconductors
Sensors

Applications

Adhesion Promoters
Assays
BioMEMS
Glassware
Nano-Imprint
MEMS

The RPX-740 is fully automated with an interface for factory automation robotics. Ideal for 300mm Wafer EFEM or 200mm Wafer Pod Loaders in an automated factory.

  • 82 liter Chamber (Capacity Reference: four 200mm Wafer Cassettes).
  • Automated Gate Valve Style Door for robotic load and unload.
  • Optional Siemens controller and SECS/GEM interface.

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