MEMS devices can usually benefit from low surface energy molecular films which minimizes the surface energy of moving or contacting surfaces preventing stiction failures. Thus, it has become common practice for all MEMS devices to use an anti-stiction coating to mitigate stiction failures. While many devices today are designed with no intentional contacting interactions, failures are still encountered with High-G drops or from sudden impacts. IST has provided anti-stiction coatings for millions of MEMS sensors over the past decade. (You might be using a handheld/wearable with coating from IST and you would never know it.)
Note there are many different types of molecular films which can be deposited: perfluorinated, non-fluorinated linear chains, or aromatic rings. Our technical staff can help you choose the proper film for your device and manufacturing needs.