Project Description

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Process Technologies

Advance Surface Modifications
ALD
Nano-Composites
PECVD
Plasma Surface Activation
Silination

Typical Industries

Genomics Research
Hearing Industries
Medical Devices
Optics
Semiconductors
Sensors
Wearable Manufacturing

Applications

Adhesion Promoters
Assays
Glassware
Hearing Aids
Imprint
MEMS
Microfluidic Devices
Oleophobic Coatings
Printed Circuit Boards
Protective nano-coating

The RPX-560 is as scale up production version of the RPX-540 with a large 90 liter chamber. The chamber can be supplied with sliding trays or other fixtures to accommodate processing a high volume of devices.

  • 90 liter Chamber (Capacity Reference: four 200mm Wafer Cassettes).
  • Multi-shelf process kits and RF configuration for uniform processing in a large batch reactor.