This customer wanted to improve their manufacturing process while also reducing their chemical waste stream and cost associated with costly solvents.


IST worked with their engineering team to develop a silane coating using our vapor deposition system. IST’s optional carrier gas-assist vapor delivery system enabled a wide range of chemistries to be used on a single system. Thus, one tool is able to support several CVD silane processes in production.

Result / Result / The IST vapor deposition process exhibited improved uniformity, less variation and film stability compared with their wet bath solution..

Let’s engineer something better, together.

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