This customer wanted to improve their manufacturing process while also reducing their chemical waste stream and cost associated with costly solvents.
IST worked with their engineering team to develop a silane coating using our vapor deposition system. IST’s optional carrier gas-assist vapor delivery system enabled a wide range of chemistries to be used on a single system. Thus, one tool is able to support several CVD silane processes in production.
The IST vapor deposition process exhibited improved uniformity, less variation and film stability compared with their wet bath solution.