The RPX-540 can deliver up to 5 separate vapor sources to a variety of substrates. It has a configurable process chamber with the flexibility to coat large objects like a laptop or many smaller shapes and sizes. For planar products, it can deliver the gases through fin-style applicators that can coat up to 21 square feet per batch. The RPX-540 has standard a 1000W RF plasma for additional in-situ surface modification. The gases are formed and delivered in the Vapporrix system, which is a proprietary technology invented by IST. The Vapporrix delivery is fully enclosed OSHA certified gas cabinet with exhaust which allows the safe use of highly flammable metal-organics commonly required for ALD. The RPX-540 system is compact and does not require side access for maintenance or operation so multiple systems can be positioned side-by-side to maximize output of your floor space. The RPX-540 has an integrated fume hood exhaust over the process chamber creating an air curtain between the user.