Project Description
The RPX-210 system is extremely compact and is intended to fit on a bench top workstation with a remote facility box to supply additional facilities. The RPX-210 system is ideal for silanation reactions on bio-consumables or wafers. With IST’s Vaporrix cartridges and chemistry can exchange in as little as 15 minutes.
- 20-liter chamber (Capacity Reference: one 200mm Wafer Cassette).
- 2 Liquid precursors.
- 2 Gas sources (O2, N2, or Ar).
- 100W Plasma Source.
- Solid Block Aluminum chamber. Corrosion Proof.
- Superior Thermal Uniformity.
- CE Mark.
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