Project Description

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Process Technologies

Plasma Surface Activation
Silination

Typical Industries

Genomics Research
R&D / Educational
Semiconductors
Sensors

Applications

Adhesion Promoters
BioMEMS
Glassware
MEMS

The RPX-210 system is extremely compact and is intended to fit on a bench top workstation with a remote facility box to supply additional facilities. The RPX-210 system is ideal for silanation reactions on bio-consumables or wafers. With IST’s Vaporrix cartridges and chemistry can exchange in as little as 15 minutes.

  • 20-liter chamber (Capacity Reference: one 200mm Wafer Cassette).
  • 2 Liquid precursors.
  • 2 Gas sources (O2, N2, or Ar).
  • 100W Plasma Source.
  • Solid Block Aluminum chamber. Corrosion Proof.
  • Superior Thermal Uniformity.
  • CE Mark.