Project Description
The RPX-210 system is extremely compact and is intended to fit on a bench top workstation with a remote facility box to supply additional facilities. The RPX-210 system is ideal for silanation reactions on bio-consumables or wafers. With IST’s Vaporrix cartridges and chemistry can exchange in as little as 15 minutes.
- 20-liter chamber (Capacity Reference: one 200mm Wafer Cassette).
- 2 Liquid precursors.
- 2 Gas sources (O2, N2, or Ar).
- 100W Plasma Source.
- Solid Block Aluminum chamber. Corrosion Proof.
- Superior Thermal Uniformity.
- CE Mark.
Related Products
- Shieldex Cartridges for Blue Lantern productmsayenko2019-04-18T16:38:13+00:00
Shieldex Cartridges for Blue Lantern product
- Vapporrix Cartridges for RPX family of productsmsayenko2019-04-17T03:02:09+00:00
Vapporrix Cartridges for RPX family of products
- Blue Lantern Desktop Plasma System (PECVD)msayenko2019-07-26T17:19:14+00:00
Blue Lantern Desktop Plasma System (PECVD)
- RPX-740 – EFEM / Pod Loader Production Enabled Toolingmsayenko2020-04-23T16:34:58+00:00
RPX-740 – EFEM / Pod Loader Production Enabled Tooling
- RPX-560 : Production Capacity Surface Modificationsmsayenko2019-04-17T14:49:52+00:00
RPX-560 : Production Capacity Surface Modifications
- RPX-540: Complete Surface Modifications for Manufacturing & Developmentmsayenko2020-12-01T05:40:22+00:00
RPX-540: Complete Surface Modifications for Manufacturing & Development
- RPX-210: Benchtop Silanation for R&D and Small Volume Productionmsayenko2020-12-22T16:32:59+00:00
RPX-210: Benchtop Silanation for R&D and Small Volume Production
