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RPX-560 : Production Capacity Surface Modifications
The RPX-560 is a scaled-up production version of the RPX-540 with a large 90-liter chamber. The chamber can be supplied with sliding trays or other fixtures to accommodate processing a high volume of devices.
90 liter Chamber (Capacity Reference: four 200mm Wafer Cassettes).
Multi-shelf process kits and RF configuration for uniform processing in a large batch reactor.
Applications
Adhesion Promoters
Assays
Glassware
Hearing Aids
Imprint
MEMS
Microfluidic Devices
Oleophobic Coatings
Printed Circuit Boards
Protective nano-coating
Typical Industries
Genomics Research
Hearing Industries
Medical Devices
Optics
Semiconductors
Sensors
Wearable Manufacturing
Process Technologies
Advance Surface Modifications
ALD
Nano-Composites
PECVD
Plasma Surface Activation
Silanation
Related Products
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