RPX-540: Complete Surface Modifications for Manufacturing & Development
The RPX-540 can deliver up to 5 separate vapor sources to a variety of substrates. It has a configurable process chamber with the flexibility to coat large objects like a laptop or many smaller shapes and sizes. For planar products, it can deliver the gases through fin-style applicators that can coat up to 21 square feet per batch. The RPX-540 has standard a 1000W RF plasma for additional in-situ surface modification. The gases are formed and delivered in the Vapporrix system, which is a proprietary technology invented by IST. The Vapporrix delivery is fully enclosed OSHA certified gas cabinet with exhaust which allows the safe use of highly flammable metal-organics commonly required for ALD. The RPX-540 system is compact and does not require side access for maintenance or operation so multiple systems can be positioned side-by-side to maximize output of your floor space. The RPX-540 has an integrated fume hood exhaust over the process chamber creating an air curtain between the user.
60 liter Chamber (Capacity Reference: two 200mm Wafer Cassettes, four 6” wafer cassettes or 13 300mm wafers).
5 Liquid Precursors (Optional Bubbler Delivery).
Flexible plasma configurations: 1000W @ 40KHz …or…. 600W @ 13.56MHz ….or….. 1000W @ 13.56MHz Pulse Mode
Solid structural Aluminum chamber construction which is corrosion proof.
Semiconductor style surface mount vapor components for quick component exchanges.
Multi-zone (chamber, vapor delivery modules, precursors) heating for a controlled temperature gradient of the entire chemical delivery system.
OSHA compliant gas cabinet enclosure for all precursors.
Ventilation Exhaust Hood for added safety to operational personnel. Ideal for working with thiols of other aromatic precursors.
Complete hardware and software interlocks.
Multi-User authorizations for restricted operation but select personnel
Windows-11 OS allows for computer networking of all log files.
Simplified facility requirements for easy maintenance and low cost installations.
On-site startup support by IST personnel.
Free process recipes for all know precursors of interests.
CE Mark / Semi-S2 / Semi-S8 Certifications.
Applications
Adhesion Promoters
Assays
Glassware
Hearing Aids
Imprint
MEMS
Microfluidic Devices
Oleophobic Coatings
Printed Circuit Boards
Protective nano-coating
Typical Industries
Genomics Research
Hearing Industries
Medical Devices
Optics
R&D / Educational
Semiconductors
Sensors
Wearable Manufacturing
Process Technologies
Advance Surface Modification
ALD
Nano-Composites
PECVD
Plasma Surface Activation
Silanation
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