The RPX-740 is fully automated with an interface for factory automation robotics. Ideal for 300mm Wafer EFEM or 200mm Wafer Pod Loaders in an automated factory. Available with SECS/GEM (E30) Communications. Contact IST to view EFEM robot options.
- 82 liter Chamber (Capacity Reference: four 200mm Wafer Cassettes).
- Automated Gate Valve Style Door for robotic load and unload.
- Optional Siemens controller and SECS/GEM interface.
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