Process Technologies
Advance Surface Modifications
ALD
Nano-Composites
PECVD
Plasma Surface Activation
Silination
Typical Industries
Genomics Research
Hearing Industries
Medical Devices
Optics
Semiconductors
Sensors
Wearable Manufacturing
Applications
Adhesion Promoters
Assays
Glassware
Hearing Aids
Imprint
MEMS
Microfluidic Devices
Oleophobic Coatings
Printed Circuit Boards
Protective nano-coating
The RPX-560 is a scaled-up production version of the RPX-540 with a large 90-liter chamber. The chamber can be supplied with sliding trays or other fixtures to accommodate processing a high volume of devices.
- 90 liter Chamber (Capacity Reference: four 200mm Wafer Cassettes).
- Multi-shelf process kits and RF configuration for uniform processing in a large batch reactor.
Related Products
Vapporrix Cartridges for RPX family of productsCarl Hung2022-01-27T13:51:50-08:00
Vapporrix Cartridges for RPX family of products
RPX-740 – EFEM / Pod Loader Production Enabled ToolingCarl Hung2022-01-25T14:28:31-08:00
RPX-740 – EFEM / Pod Loader Production Enabled Tooling
RPX-560 : Production Capacity Surface ModificationsCarl Hung2022-03-23T15:38:46-07:00
RPX-560 : Production Capacity Surface Modifications
RPX-540: Complete Surface Modifications for Manufacturing & DevelopmentCarl Hung2022-08-14T14:00:53-07:00
RPX-540: Complete Surface Modifications for Manufacturing & Development
RPX-210: Benchtop Silanation for R&D and Small Volume ProductionCarl Hung2022-08-14T14:02:33-07:00
