Stiction Control

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Hirosi Flex Obligue View

Complex Cantelever Structure

Hirosi Flex Connector Bottom Barb

Cantelevers Perform Better With Anti-Stiction Coating Treatment

Anti-stiction treatments improve the peformance of devices such as microphones, accelerometers, and micro-switches.


Advanced Stiction Control of MEMS devices and other super-critical components allows designers to push their performance limits to new levels, opening up higher value market spaces and creating longer-lived, higher-reliability devices. The RPX-540 has the widest process window for the application of a multitude of anti-stiction coatings, such as those presented on the right.

Refellix Introduction

For a further explanation of the deposition technology and precursors available, consult the brochure below.

Refellix Introduction