Complex Cantelever Structure
Cantelevers Perform Better With Anti-Stiction Coating Treatment
Anti-stiction treatments improve the peformance of devices such as microphones, accelerometers, and micro-switches.
Advanced Stiction Control of MEMS devices and other super-critical components allows designers to push their performance limits to new levels, opening up higher value market spaces and creating longer-lived, higher-reliability devices. The RPX-540 has the widest process window for the application of a multitude of anti-stiction coatings, such as those presented on the right.
For a further explanation of the deposition technology and precursors available, consult the brochure below.